SLTz-eNmW[ET[rXΝnCeNιΖΜ€Jπx΅ά·BΔπ_ΙAMEMSAoCIΜΩνͺμΜZπΪw·ϋΙ³ά΄άΘT[rXπρ΅ά·B
MEMSfoCX/oCI`bv
SOIAZ~R_N^[ήΏΜΚΜ
E}[Pbg/eNmW[T[` EΔΕΜήΏ²BγsΖ±¨ζΡ_έ§ EΔΕΜAJEgΖ± EΔΕΜZ[XbvT[rX
EΕζ[oCI`bvALab on@a Chip EMEMSfoCX EZT[ E|}[» EKXiSol-Gelj»EΑH EBi-CMOS Foundry